Meyer Burger AG
IUS 2016: Booth N° 25
Drawing upon broad experience and expertise, MicroSystems as an independent business unit of Meyer Burger (Germany) AG located in Hohenstein-Ernstthal (Saxony) is a leading, worldwide operating supplier of plasma and ion beam processing systems for semiconductor, MEMS, TFH (HDD), sensor production, high precision optics manufacturing and photovoltaic industries.
The systems are applied in thin film deposition and etching, contactless localized surface error corrections and various other fields. Processes supported include Ion Beam Etching (IBE), Ion Beam Sputter Deposition (IBSD), Plasma Enhanced Chemical Vapor Deposition (PECVD), Physical Vapor Deposition (PVD) and Reactive Ion Etching (RIE).
The product portfolio reaches from small wafer-based systems for samples up to 200 mm dia. to large area systems for substrates up to 500mm x 500mm or even bigger. Configurations include stand-alone systems, cluster systems and inline systems for a variety of processes either in a standard layout or for customized solutions.
In-house developed plasma and ion beam sources in various configurations form the basis of all process systems that are developed by MicroSystems.
Kai Linsenmaier – Area Sales Manager
Email: kai.linsenmaier (@) meyerburger.com
Tel: +49 174 30 99 767