Advanced Modular Systems, Inc.

IUS 2016: Booth N° 1

Advanced Modular Systems Inc. (also known as AMSystems, or AMS, Inc.) is a world leader in manufacturing of deposition systems for Piezoelectric Aluminum Nitride (AlN) used in FBAR filters made for cell phones and other wireless applications.

 AMSystems also designs, manufactures and services thin film processing equipment for the coating and ion mill trimming

 AMSystems focuses on simplicity of design to deliver an economical and reliable system with a smallest footprint.

 AMSystems provides:

  • A complete and comprehensive solution for FBAR/BAW and piezo-MEMS technologies, including thin film deposition (piezoelectric and electrodes) along with precise thickness and frequency uniformity trimming.
  • Frequency trimming solution for SAW Technology.
  • Thickness and thickness uniformity trimming process for SOI, Lithium Tantalite, Lithium Niobate and other substrates.

 Our main products and services include:

  • Systems for Deposition of Piezoelectric (aluminum nitride, AlScN), Dielectric and Metal (molybdenum, tungsten, titanium and other materials) thin films
  • Systems for Ion Beam Film Thickness and Frequency Trimming/Tuning
  • Foundry Service – PVD Deposition and Etch/Trimming/Tuning Processes
  • Deposition and Trimming performed in the same cluster tool

Onsite Contact:
Sergey Mishin
Email: smishin (@)
Tel: + 1 805-692-0912