2E – Fundamental Principles of Bulk-Acoustic-Wave Resonator Acoustics

Title2E - Fundamental Principles of Bulk-Acoustic-Wave Resonator Acoustics
InstructorRobert Thalhammer, Avago Technologies, a Broadcom Ltd company, Munich, Germany
Overview of topics covered

  • Fundamental concepts of structural mechanics

  • Piezoelectricity

  • Temperature effects and temperature drift compensation

  • Acoustic modeling

  • The concept of plate dispersion

  • Modes on the main dispersion branch

  • Spurious modes in piezoelectric resonators

  • Spurious mode suppression

TimeMonday, October 22
AbstractThis short course introduces to the fundamental principles of bulk-acoustic-wave resonator acoustics. It covers the basics of structural mechanics and piezo-electricity from the perspective of coupling the physical domains of elasticity and electrostatics. The governing equations have two important fundamental solutions: longitudinal and shear waves. We are going to discuss their properties and the associated material parameters, together with their dependence on temperature. For analyzing lateral waves in multiple dimensions, the concept of plate dispersion turned out to be a powerful technique. After introducing its basic principles, it will be applied to the investigation of spurious modes in piezoelectric resonators. Structural concepts for spurious mode suppression will be discussed for different types of resonator designs.
Short CV of Instructor Robert K. Thalhammer received the M.Sc. degree in physics and the Ph.D. degree in physics from the Munich University of Technology, Munich, Germany. In 2000, he joined Infineon Technologies, where his research interests are in design, modeling, simulation, and characterization of discrete RF structures. Since 2003, Robert is working on Bulk-Acoustic-Wave technology, including finite-element modeling for the electric and acoustic simulation of resonators. He is now with Avago Technologies since 2008, where his major focuses are FBAR physics, multi-physics modeling, and novel BAW device concepts.