SF Bay Area Nanotechnology Council


October 18: Metrology in Nanotechnology

TITLE: Metrology in Nanotechnology

Dr. Min Yang, Director of Applications Development at Bruker Nano Surfaces


Tuesday, October 18th, 2016  11:30 AM – 1:00  pm

Texas Instruments (TI) Auditorium E-1
2900 Semiconductor Drive
Santa Clara, CA map

Admission FREE ($5 donation requested). Please register here.


We are now in a very exciting period of time when many new and disruptive technologies emerge across a wide range of industries, making the existing technologies obsolete faster than anyone could anticipate. The new products with emerging technologies are generally smaller, lighter, stronger, more reliable and cheaper. To achieve all these, process control has becoming more important than ever, which gives good opportunities for various metrology tools to be incorporated into the advanced manufacturing processes. This leads to new challenges to integrate the metrology tools into the manufacturing tools. In this talk, I will review and compare several metrology tools and their applications in nanotechnology, and discuss about some of the challenges in integrating the tools into the manufacturing process.



Dr. Min Yang joined Bruker Nano Surfaces as Director of Applications Development, responsible for developing new applications for tribology, optical and stylus metrology, and optical coordinate measurement. Min has over 20 years of experience in tribology, metrology and failure analysis, mostly in the data storage business in Silicon Valley. She started her career as a tribology integration engineer for head/disk interface designs and held a number of positions at IBM and Western Digital in tribology and failure analysis. Prior joining Bruker, Min was an Engineering Director at Western Digital, responsible for the development of tribology and failure analysis testing on a wide variety of instruments including, SEM/EDX, AFM, FIB, TOF-SIMS, FTIR, Raman, optical analysis tools, and test chambers. Min holds a BSEE from Beijing University of Technology, a Masters in Materials Science from Beijing Aeronautical Materials Institute, and both a Masters in Mechanical Engineering and a PhD in System Engineering from UC San Diego.


  • 11:30 am – Registration & light lunch (pizza & drinks)
  • Noon – Presentation & Questions/Answers
  • 1:00 pm – Adjourn
COST: FREE, but a $5 donation is requested to help cover the cost of lunch

Please register here.

Also, visit our Meetup Group.